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A new method was developed to thermally isolate monolithic antenna-coupled infrared microbolometers from their substrate. Using a SiO2 sacrificial layer to create a 400nm thick Si3N4 membrane, square spiral antennas coupled to Ni microbolometers were fabricated and tested. The responsivity of the thermally isolated devices is 164 times greater than a similar device that is not fabricated on a membrane.
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Middleton et al. (2006) studied this question.
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