Modelling and measurements of a composite microcantilever beam for chemical sensing applications

A resonant microcantilever beam gas sensor was designed and fabricated in Carnegie Mellon University using complementary metal oxide semiconductor (CMU-CMOS) technology. The cantilever beam modified with a suitable sorbent coating was demonstrated as a chemical transducer for monitoring hazardous vapours and gases at trace concentrations. The design of the cantilever beam included interdigitated fingers to allow electrostatic actuation of the device and a piezoresistive Wheatstone bridge design to read out the deflection signal. The cantilever beam resonant frequency was modelled using the Euler-Bernoulli beam theory and ANSYS. The beam resonant frequency was measured with an optical laser Doppler vibrometer. Good agreement was obtained among the measured, simulated, and modelled resonant frequencies. A custom sorbent polymer layer was coated on the surface of the cantilever beam to allow its operation as a gas-sensing device. The frequency response as a function of exposure to the nerve agent simulant dimethylmethylphosphonate (DMMP) at different concentrations was measured, which allowed a demonstrated detection at a concentration of 20 ppb or 0.1 mg/m 3 . The air-polymer partition coefficient K, for DMMP was estimated and compared favourably with the known values for related polymers.