Experimental and theoretical studies of singlet oxygen excitation in travelling microwave (TMW) discharges are presented. Singlet oxygen O 2 (a 1 Δ g ) concentrations and atomic oxygen mole fraction have been measured for different pressures, input powers and distances from the MW resonator. It was shown that a steady-state TMW discharge with a coaxial cavity resonator could provide a maximal O 2 (a 1 Δ g ) yield of 22% for 2 Torr of pure oxygen and 27–30% for He : O 2 = 1 : 1 mixture. The two-dimensional ( r , z ) model developed for calculations of plasma-chemical kinetics, heat and mass transfer was used for simulation of processes in the TMW discharge under study. Effects of gas pressure, gas flow rate and input power are studied and compared with experimental measurements of O 2 (a 1 Δ g ) concentrations and atomic oxygen mole fractions.
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Savin et al. (2004) studied this question.
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