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May 1, 1988Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Laser diagnostic techniques for reactive ion etching: Plasma understanding to process control

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GSGary S. SelwynUnited States Naval Research Laboratory

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Gary S. Selwyn (1988) studied this question.

synapsesocial.com/papers/6ab0a94982dff9e092959b9dhttps://doi.org/10.1116/1.575597
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