Recent advances in electron probe microanalysis

The electron probe microanalyser has long been established as an important means of studying chemical composition on a scale of 1 μm or less, by exciting characteristic x-ray emission from the sample with a finely focused electron beam. Extensive development of the technique has taken place in the past few years, and this is described under the headings of electron optics, x-ray spectrometry, scanning image formation, automatic control and combined instruments. The implications of these advances are discussed both from the point of view of the instrument designer and of the user.