Integrated Behavior Simulation and Verification for a MEMS Vibratory Gyroscope Using Parametric Model Order Reduction

In this paper, a parameterized reduced model of a vibratory microelectromechanical systems (MEMS) gyroscope is established using a parametric model order reduction algorithm. In the reduction process, not only the input angular velocity, material density, Young's modulus, and Rayleigh damping coefficient but also the coefficient of thermal expansion and the change in temperature were all preserved. Based on this model, the integrated behavior simulation of the MEMS gyroscope, including many environmental factors in engineering situations, was performed in an accurate and fast way. Compared with the finite-element method, the relative error of the reduced-order model was less than 4.2%, while the computational efficiency was improved about five times. The cosimulation with a complete interface circuit was successfully performed in a very fast way, which provides a convenient platform for designers to evaluate the performance of sensors. The experimental verification proves that the reduced model can provide a reliable simulation result, although some errors exist.