Rapid and Precise Testing Techniques for MEMS Pressure Sensors Without Input Stabilization

This paper describes two fast and accurate characterization methods for micro-electromechanical systems (MEMS) pressure sensors without stabilizing environmental parameters. The1ˢᵗmethod uses the time logging information of the acquired measurement data (time-based method). The2ⁿᵈmethod is based on forcing and finding inflection data points (‘Echternach’ method). A MEMS piezoresistive pressure sensor was used to demonstrate the effectiveness of the two methods. The time-based characterization method reduced the characterization time by 66 times and increased the number of data samples 5-fold compared to a conventional method. The mismatches between the time-based and conventional methods were 0.015% full scale (FS, 1.7 bar) and 0.022% FS in terms of sensitivity and offset of the pressure sensor, respectively. Also, the ‘Echternach’ characterization method reduced the characterization time by 11 times and increased the number of data samples by 2.5 times compared to the conventional method. The mismatches between the ‘Echternach’ and the conventional methods were 0.059% FS and 0.012% FS in terms of sensitivity and offset of the pressure sensor, respectively. [2025-0040]