Operating parameters of powerful UV and vacuum ultraviolet (VUV) excilamps with different discharge geometry excited by capacitive discharge, barrier discharge, glow discharge, and UV-preionized discharge were investigated. Intense radiation of Ar2*, Kr2*, Xe2*, ArF*, KrBr*, KrCl*, KrF*, XeI*, Cl2, XeBr*, XeCl*, XeF* molecules and I* atoms was obtained in rare gas or in rare gasF2 (Br2, CH3Br, Cl2, Br2, HCl, I2, NF3) mixtures.
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В. Ф. Тарасенко (2002) studied this question.
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