Deposition of a hydrothermal method has a number of advantages; low deposition temperature, high-purity, deposition on a three-dimensional structure, and a large thickness. The present paper investigates the improvement of an epitaxial lead zirconate titanate (PZT) thin film deposited via hydrothermal synthesis. The critical parameter contributing to the film morphology was revealed to be the holding position of the reaction solution during deposition. In addition to this improvement, the SrRuO3 bottom electrode was confirmed to be able to withstand high alkali concentrations during the hydrothermal reaction. A hydrothermal synthesis time of 24 h yielded a PZT film with a thickness of 500 nm on SrRuO3/SrTiO3 (100) at 150 °C. The remanent polarization 2Pr and coercive electric field were 38.4 μC/cm2 and 21.8 kV/cm, respectively.
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Morita et al. (2004) studied this question.
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