Physical insights on comparable electron transport in (100) and (110) double-gate fin field-effect transistors

We have investigated the physical mechanisms that result in comparable electron mobility measured from (100) and (110) sidewall double-gate fin field-effect transistors (FinFETs). Using a self-consistent Schrodinger-Poisson simulator coupled with a sp3d5s* tight-binding bandstructure, we have shown that the (100)/〈100〉 and (110)/〈110〉 average conductivity effective mass values are similar. This is explained by the much heavier non-parabolic confinement mass for Δ2 valley of (110) FinFETs, which leads to lower Δ2 energy than Δ4. Thus, for both (100) and (110), the majority of electrons occupy the Δ2 valley with 0.19m0 conductivity effective mass, resulting in comparable electron mobility.