Design and experimental investigations of a two-dimensional laser scanner based on piezoelectric actuators

A compact two-dimensional laser scanner based on piezoelectric actuators is presented. The scanner consists of two single-axis laser scanners placed perpendicular to each other, which exhibit the advantages of small size, large angle, high scanning speed, and high linearity. The mechanical structure and principle of the scanner are introduced and the performance of the scanner is experimentally investigated. The result shows that the maximum angle of the scanner is approximately 9.315 deg with a main resonant frequency of 1242 Hz. An open-loop controller based on a hysteresis compensation algorithm and analog notch filter is proposed. Its nonlinearity is reduced to ±0.5% after compensation. High frequency scanning and the step response of the scanner are also studied to demonstrate the performance and effectiveness of the scanner.