From micro- to nanosystems: mechanical sensors go nano

This paper reviews the impact of scaling on the system performance of mechanical inertia sensors. Permanent cost pressure will result in continuous efforts to integrate more functions into further miniaturized systems. As a consequence microsystems (MEMS) will also incorporate functional nano devices such as carbon nanotubes and nanosystems might replace microsystems for certain applications in the future. Therefore, a review of the application of carbon nanotubes for sensors with a focus on mechanical sensors is provided. Nanosystems are defined as systems that involve electronic and non-electronic elements and functions on the nano scale. Surface properties of materials and the influence of texture will outbalance bulk properties on the micro and nano scale. Therefore, a discussion of mechanical material properties is added to the review. Finally it is concluded that mechanical sensors will go nano provided that self-assembly of nanostructures becomes a well-controlled fabrication technology.