Diamond–Carbide–Silicon Composite “Skeleton” as a Promising Material for X-Ray Optical Substrates

The paper proposes the use of diamond–carbide–silicon composite „Skeleton“® coated with amorphous silicon as substrates for multilayer X-ray mirrors for powerful synchrotron radiation sources (3+ and 4th generation). The surfaces with the following parameters were obtained using standard deep polishing methods: flatness at the level of RMS90% = 54.2 nm; effective roughness σeff ~ 1.0 nm; high-frequency roughness σ2 × 2 ~ 0.1 nm.