Measurement of neutral and ion sputtering yields by matrix isolation spectroscopy

Matrix isolation spectroscopy is used to investigate the sputtering of several metal surfaces and of TiO2. The sputtered species are collected in a cryogenic noble gas matrix, and their identities and amounts are established from optical absorption spectroscopy. The technique is sensitive enough to allow the measurement of sputtering yields as low as 0.01. Furthermore, it provides for essentially simultaneous detection of neutrals and ions using the same sputtering and collection geometry. Thus, with known detection sensitivities for ions and neutrals, absolute values for sputtered ion fractions can be obtained. Data will be presented for Ti, Zr, Mo, V, and TiO2 bombarded by low energy (∠2 keV) Ar+, O2+, and N2+, and will be compared with various models for calculating sputtering yields.