Application of x‐ray photoemission electron microscopy developed at SPring‐8 BL15XU

This is the authors' abstract. We don't add key points for this paper.

We have been developing x‐ray photoemission electron microscopy (XPEEM) designed for measurement with both soft x‐rays and hard x‐rays at SPring‐8 beamline BL15XU, in order to realize two‐dimensional chemical analysis and to establish a technique for the micro‐area x‐ray absorption fine structure (XAFS) for practical materials. In this work, surface images of SbTe amorphous/crystalline patterned film, used as the recording layer for the digital versatile disc—rewritable (DVD + RW), were observed by XPEEM. We have also demonstrated the micro‐area x‐ray absorption near‐edge structure (XANES) of Sb L III spectra in a 200 × 200 nm 2 area by means of XPEEM, and successfully distinguished the spectrum of the amorphous bit region from that of the crystalline region.