The physical basics of glow discharge optical emission spectroscopy are considered. The scheme of the system used for chemical analysis of coatings by glow discharge optical emission spectroscopy is described by the example of a Profiler 2 instrument (Horiba Jobin Yvon). Various types of coatings and methods for surface treatment are compared. On the basis of these studies, it is established that, under the basic measuring regimes without fine adjustment of sputtering parameters, the maximum analyzed depth of coatings is around 80 μm and the depth resolution is 10–20 nm. Almost any combinations of substrate and coating materials, including ceramics, glasses, and polymers, can be analyzed.
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Ph. V. Kiryukhantsev–Korneev (2012) studied this question.
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