Image‐based hysteresis modeling and compensation for an AFM piezo‐scanner

As an important component of Atomic Force Microscopes (AFM), a piezo‐scanner exhibits some undesired nonlinear characteristics, among which the inherent hysteresis largely decreases positioning accuracy during scanning and nano‐manipulation process. To alleviate this problem, an image‐based approach is proposed in this paper to model and then compensate for the hysteresis behavior of the piezo‐scanner. Specifically, some scanning images over standard samples are utilized to identify the parameters of the classical Preisach model (CPM) of hysteresis. On the basis of the obtained model, an inversion‐based technique is adopted to design a compensator for the hysteresis of the piezo‐scanner. The proposed algorithm presents such advantages as low cost and little complexity since no nanoscale position sensor is required to collect identification data. Some scanning and nano‐imprinting results are included to demonstrate the performance of the proposed strategy.