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We report fabrication of miniaturized low temperature co-fired ceramic helical (3-D) inductors with more than seven layers of helices and the conductor linewidth of 100mum. We achieve the QmaxLeff/A product ranging from 200 to 370. Such high values are possible thanks to the drastic reduction of the active area and still acceptably large Qmaxand self-resonant frequency. High frequency characterization of the inductors is performed up to 12GHz, and a new equivalent circuit model considering vertical electromagnetic coupling between conductors is shown to reproduce all the measured characteristics
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Heo et al. (2007) studied this question.
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