Tungsten/beryllium multilayers were coated onto lamellar diffraction gratings using a neutral atom beam sputtering technique. Boundary roughness of the multilayer was estimated to be 6.0 Å as a standard deviation. Diffraction efficiency of the multilayer-coated grating was measured using monochromatized synchrotron radiation.
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Takahashi et al. (1989) studied this question.
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