The atomic number and absorption corrections in electron microprobe analysis at low electron energies

From an extensive series of measurements of ϕ(ρz) curves, at electron energies between 6 and 15 KeV, an empirical formula;ϕ(R)=DKn(KR) n−1 exp(−(KR) n ) where R=ρz+ρz o , was developed to accurately describe the shape and magnitude of the measured curves. On the basis of this equation a quantitative correction for absorprion and atomic mumber effects has been derived for low electron energies. A comparision of quantitative analysis using the above equation wit other absorption and atomic number corrections shows better agreement between calculated and known concenequation to a correction for fluorescence due to characteristic lines is outlined.