Design and analysis of photonic MEMS based micro ring resonators for pressure sensing application

The proposed work consists of a ring resonator-based pressure sensor. Double and triple ring photonic crystal resonators are configured in series and in parallel combinations. The sensing layer is designed and simulated for a varying pressure of 3–9 MPa using ansys workbench to obtain the stress and deformation experienced by the sensor. The equivalent refractive index value for every stress is computed and shift in wavelength is determined by simulation of the photonic crystal ring resonator (PCRR) structures in the optical tool. Finite-difference time-domain results show that ‘three rings coupled in parallel’ PCRR structure have the best sensitivity and good quality factor than other sensing configurations. A maximum sensitivity of 49.77 nm MPa −1 and a quality factor of 3260.25 is observed for the triple-ring parallel PCRR. The proposed type of sensor has remarkable biosensing applications.