Dependence of structure and properties of Ba(Zr0.25Ti0.75)O3thin films on temperature and post-annealing

Ba(Zr 0.25 Ti 0.75 )O 3 thin film was deposited on a LaNiO 3 -coated SiO 2 /Si substrate by pulsed-laser deposition. Crystallinity, ( h 0 0) texture and surface texture were found to be improved, and the out-of-plane lattice parameter d , polarization P , dielectric constant ε r (0) and tunability n r were found to increase with increasing deposition temperature or post-annealing duration. Improvement in crystallinity is believed to be the reason for the improved properties. The increase in the out-of-plane lattice parameter of the highly ( h 0 0) textured thin film causes the increases in n r and P , while the changes in ε r and n r are closely associated with the changes in ε r (0) and P . A high tunability of 76% measured at the frequency of 1 MHz could be achieved for the film deposited and annealed at 640 °C, showing that Ba(Zr 0.25 Ti 0.75 )O 3 thin film would be a potential candidate for future tunable devices.