Membrane-supported CPW with mounted active devices

This paper reports the fabrication of printed circuit lines on a 5 μm thick membrane that minimizes dielectric loss and effectively eliminates surface modes, both of which are important for operation at millimeter-wave and submillimeter-wave frequencies. The relatively low-cost low-temperature process uses a photosensitive resin (SU-8) to form the membrane and enables devices to be mounted on it.