Diamond mirrors have been fabricated by depositing a diamond thin film on a Si3N4 substrate by means of chemical vapor deposition (CVD). The reflectivities of the CVD diamond mirrors in the vacuum ultraviolet region from 30 to 2000 Å are reported and compared with those of SiC and gold-coated SiC mirrors measured in this work. The optical constants of the CVD diamond film are obtained from the reflectivities measured and also compared with those of a bulk crystal reported in the literature.
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Sasano et al. (1995) studied this question.
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