Optical constants for thin films of C, diamond, Al, Si, and CVD SiC from 24 Å to 1216 Å

A method for deriving optical constants from reflectance vs angle of incidence measurements using a nonlinear least-squares curve-fitting technique based on the chi(2) test of fit is presented and used to derive optical constants for several thin-film materials. The curve-fitting technique incorporates independently measured values for the film surface roughness, film thickness, and incident beam polarization. The technique also provides a direct method for estimating probable errors in the derived optical constants. Data are presented from 24 A to 1216 A for thin-film samples of C, synthetic diamond, Al, Si, and CVD SiC. Auger electron spectroscopy depth profiling measurements were performed on some of the samples to characterize sample composition including oxidation and contamination.