Non-Destructive Measurement of Surface Concentrations and Junction Depths of Diffused Semiconductor Layers

Infrared reflectivity of the diffused semiconductor with continuously varying impurity concentration is treated strictly, and computed numerically using an electronic computor. It is shown for thin diffused layers in silicon used for the ordinary planar technology that the wavelength of a reflectivity minimum, λmin, depends not only on the surface concentration, but also the diffusion depth. It has been found that the surface concentrations and junction depths of the diffused semiconductor layer can be determined non-destructively using λminand sheet resistivity, provided the following seven conditions are satisfied. (1) Semiconductor materials (2) type of conductivity (3) bulk concentration (4) function-type of diffused impurity profile,F(x), are given, (5)pnjunction is formed by diffusion, (6)F(x) has not unknown parameters except for the diffusion length of diffused impurity, √Dt, and (7)F(x) is a monotonic decreasing function. The figures usable for the above purpose are given forn-type complementary error function layer andn-type Gaussian layer in Si.