Experimental study demonstrates 380 μm displacement and 4.96 ms response time in a MEMS micro-actuator, indicating strong potential for low-voltage micro-switches.
This article proposes a bistable electromagnetic micro-actuator consisting of a planar suspended platform and an integrated micro-coil, which was fabricated by micro-electromechanical systems technology. Its operational principle is based on the equilibrium between the magnetic force and elastic force. The elastic force of the suspended platform is analyzed by Castigliano's theorem, and the magnetic force is analyzed by the magnetic circuit method. Both the mechanical and magnetic characteristics were simulated by the finite-element method and verified by testing. Test results showed that the bistable electromagnetic micro-actuator could be realized at a voltage pulse of 5 V with 380 μm of large displacement, and the response time is about 4.96 ms.
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Miao et al. (2012) studied this question.
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