Electron collision cross section sets of TMS and TEOS vapours

Reliable and detailed sets of electron collision cross sections for tetramethylsilane [TMS, Si(CH 3 ) 4 ] and tetraethoxysilane [TEOS, Si(OC 2 H 5 ) 4 ] vapours are proposed. The cross section sets of TMS and TEOS vapours include 16 and 20 kinds of partial ionization cross sections, respectively. Electron transport coefficients, such as electron drift velocity, ionization coefficient, and longitudinal diffusion coefficient, in those vapours are calculated by Monte Carlo simulations using the proposed cross section sets, and the validity of the sets is confirmed by comparing the calculated values of those transport coefficients with measured data. Furthermore, the calculated values of the ionization coefficient in TEOS/O 2 mixtures are compared with measured data to confirm the validity of the proposed cross section set.