Integrated micro-scanning tunneling microscope

Two versions of micro-scanning tunneling microscopes (micro-STMs) have been fabricated. The integrated micro-STMs are fabricated from single crystal silicon using the high-aspect-ratio SCREAM process. Each micro-STM includes integrated xy comb drive actuators and a torsional z actuator with integrated cantilever and tip. One micro-STM measures approximately 200 μm on-a-side and is an example of a STM element for a STM array architecture. Another, larger micro-STM/atomic force microscope measures 2 mm on-a-side including a 1 mm long cantilever with a 20 nm diam tip. We demonstrate the operation of this larger STM by obtaining a STM image of a 200 nm metal conductor on a silicon chip.