A flexible microactuator with 3 degrees of freedom was developed for micromanipulators. The device was made of fiber reinforced rubber (FRR) and its deformation controlled by an electrohy-draulic or electropneumatic system. This report deals with its dynamic characteristics from a practical point of view. First, a transfer function of the actuator is derived theoretically, considering (1) a fundamental frequency of FRR, (2) compressibility of working fluid in the actuator, and (3) friction of tubes between the actuator and control valves. Secondly, step responses of the prototypes are shown under various conditions. The response time is about 0.1 (s) with small tube friction, or 3(s) with large tube friction.
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Koichi Suzumori (1990) studied this question.