The impact of device operating parameters on the ON-state resistance (RON) of microelectromechanical relays with tungsten (W) electrodes is reported. Due to the susceptibility of W to oxidation,RONincreases undesirably over the device operating cycles. This issue is aggravated by Joule heating when the relay is in the on state. The experimental results confirm that shorter ON time, as well as shorter off time, provides for more stableRONwith respect to the number of ON/OFF switching cycles.
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Chen et al. (2012) studied this question.
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