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Thin films of various vanadium oxides, including the phase transition material vanadium dioxide, have been deposited onto sapphire substrates by reactive ion-beam sputtering. In this process, an argon ion beam sputters a vanadium target in the presence of an oxygen background. Coating chemistry, structure, surface morphology and electrical properties, together with the optical response at 3.4 μm wavelength, were studied as a function of the variation of film growth temperature Ts. Films deposited in the range 350 °C
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Elizabeth E. Chain (1986) studied this question.
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