Parametric excitation of a micro Coriolis mass flow sensor

We demonstrate that a micro Coriolis mass flow sensor can be excited in its torsional movement by applying parametric excitation. Using AC-bias voltages for periodic electrostatic spring softening, the flow-filled tube exhibits a steady vibration at suitable voltage settings. Measurements show that the sensor for this type of excitation can be used to measure water flow rates within a range of 0 ± 500 μl/h with an accuracy of 1% full scale error.