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Modeling, design, fabrication and characterization of a micro Coriolis mass flow sensor, Haneveld, J, Lammerink, T S J, de Boer, M J, Sanders, R G P, Mehendale, A, Lötters, J C, Dijkstra, M, Wiegerink, R J
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Haneveld et al. (2010) studied this question.
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