Electronic and thermal generation of vibrations of optically excited cantilevers

The results of the theoretical analysis of the dynamic effects in the optically excited cantilevers were given. Theoretical model for dynamic elastic bending for two-layer cantilevers was derived including electronic and thermal elastic deformation effects which have the main influence on the dynamics of the cantilevers. The influence of the carrier transport characteristics (the carrier diffusion coefficient, the lifetime of photogenerated carriers, and the carrier recombination velocities) to the elastic vibrations of cantilevers was analyzed. Theoretical model was verified by comparing with the experimental results. The results of these investigations are important for sensors, actuators, and resonators based on the cantilevers.