We have carried out studies of morphologies of silver surfaces irradiated by ArF eximer laser irradiation in vacuum (10-3 Pa). Three different morphologies were observed corresponding to various laser fluences. In the high irradiation region (above 600 mJ/cm2), wave-like ridges and droplets were observed. In the intermediate region (about 200 mJ/cm2), ripples were observed. In the low irradiation region (below 70 mJ/cm2), changes were not observed using an optical microscope, but were with an atomic force microscope (AFM). We have clarified that laser irradiation in the fluence range below 70 mJ/cm2 yields a silver surface with excellent corrosion-resistant properties.
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Tabuchi et al. (2000) studied this question.
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