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Multi-Scale Analysis and Elementary Reaction Simulation of SiC-CVD Using CH3SiCl3/H2: I. Effect of Reaction Temperature, Fukushima, Yasuyuki, Sato, Noboru, Funato, Yuichi, Sugiura, Hidetoshi, Hotozuka, Kozue, Momose, Takeshi, Shimogaki, Yukihiro
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Fukushima et al. (2013) studied this question.
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