High Throughput Screening of Surface Modificated In2O3 for VOC Gas Sensing Array Optimization

Gas sensor array & pattern recognition is the most promising method to improve the anti-interference performance of metal oxide gas sensor. How to choose the initial gas sensor array is very important in gas sensor array optimization. In this paper, an initial array optimization method based on combinatorial and high-throughput (CHT) method is proposed. In2O3samples were synthesized by non-aqueous sol-gel method. The metal ion modified In2O3gas sensing film was deposited by a gas-sensing film parallel synthesis platform using a combinatorial and high-throughput (CHT) experiment process. A high-throughput gas sensing unmanned testing platform was used to characterize the gas sensing properties. Volatile organic compounds (VOCs), including benzene, toluene, xylene, ethanol, acetone and formaldehyde, were tested at constant temperature and under temperature programmed cooling. And the In2O3-based gas sensing film with Ho, Ir, Ru, Mn, V and Mo surface modification were screened out with good cross-selectivity to different VOCs. All the results in this work form a comprehensive and detailed database, providing a reference for choosing the initial gas sensor array.