Oxide films of eleven metals have been prepared by reactive sputtering. The use of refrigerated substrates resulted in amorphous films in eight of the metal‐oxide systems. Crystallization of the amorphous films gave rise to metastable, high‐temperature polymorphs of , , and , and an unidentified tellurium oxide phase. High‐oxidation‐state compounds of silver, antimony, and lead were prepared. Optical properties of some films were examined. Films with a high refractive index and low optical absorption were prepared by crystallization of the highly absorbing, amorphous, bismuth oxide films.
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Lieberman et al. (1969) studied this question.
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