Evidence is presented that the final products of stripping an isoprene photoresist in an oxygen plasma are primarily oxides of carbon and water. The by‐product gases are trapped in the exhaust of the reactor and weighed. The results are consistent with the conclusion that essentially all of the hydrogen in the photoresist becomes water and roughly half of the carbon becomes carbon dioxide. Presumably the other half becomes carbon monoxide which passed through the liquid nitrogen trap as a vapor.
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Reichelderfer et al. (1977) studied this question.