Deposition of Hydrogen-Free Silicon Nitride Thin Films by Microwave ECR plasma Enhanced Magnetron Sputtering at Room Temperature, Ding Wan-Yu, Xu Jun, Piao Yong, Li Yan-Qin, Gao Peng, Deng Xin-Lu, Dong Chuang
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Wan-Yu et al. (2005) studied this question.
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