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Active microvalves and micropumps have been manufactured by combining membranes with LIGA structures of metal. These structures have been galvanized on thin titanium membranes. They have been covered by glass platelets to form cavities for microfluidic components. After separation from the substrate the cavities are tightly closed on one side by a thin micromembrane, which acts as a functional part of the fluidic component.
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Schomburg et al. (1993) studied this question.
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