The migration of nitrogen is examined in β−Ga2O3 to determine if diffusion is governed by molecular or monatomic diffusion. Special samples are grown by pulsed laser deposition where the isotopes 14N and 15N are spatially separated. This is verified by secondary-ion-mass spectrometry measurements. Insight into the migration process is obtained from gas effusion. The experimental data provide clear evidence for monatomic nitrogen diffusion in β−Ga2O3.
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Nickel et al. (2026) studied this question.
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