Chromatically dispersed interferometry with wavelet analysis

A new white-light interferometry point sensor utilizing a chromatically dispersed depth detection field is addressed. Monitoring the interference in the optical frequency domain allows for microscopic height detection without the necessity of a mechanical axial scan. The problem of limited dynamic range in previously reported spectral interferometric schemes is solved by forming a high-contrast interference window due to the chromatically dispersed focusing of the detection field. In a proof-of-principle experiment, the position of a reflecting object could be retrieved with a focus of 0.8 NA over an axial range of 30 microm by analyzing the phase of the emerging interference wavelets.