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The phenomena of flow velocity and flow pattern in the meniscus region due to the IPA vapor effect were experimentally investigated by Stereoscopic Particle Image Velocimetry (Stereo PIV) analysis using an experimental apparatus simulating the Rotagoni drying function. Unlike nitrogen gas supply, IPA vapor gas generates Marangoni liquid flow in the meniscus region, and the direction of this liquid flow is the same as the centrifugal force direction due to rotation, which is also the direction of liquid discharge from the wafer surface.
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Ishibashi et al. (2026) studied this question.
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