Sputtering‐Time‐Dependent Structural and Optical Properties of (002)‐Oriented ZnSe Nanofilms

ZnSe nanofilms with a preferred (002) orientation were deposited on Si substrates by radio‐frequency (RF) magnetron sputtering. The sputtering time was varied from 5 to 20 min to investigate its effect on the structural and optical properties of the films. With increasing sputtering time, the crystallite size estimated from the X‐ray diffraction (XRD) patterns increased from approximately 22 to 46 nm, while the band‐edge emission shifted from 3.23 to 3.01 eV. The defect‐related emission also changed with sputtering time. The CIE 1931 chromaticity coordinates of the samples deposited for 15 and 20 min were (0.35, 0.34) and (0.39, 0.40), respectively, and were assigned to the white‐light region in the chromaticity diagram. These results show that sputtering time provides a convenient means of adjusting the photoluminescence of ZnSe nanofilms and obtaining emission with chromaticity coordinates in the white‐light region.