Electron-Induced Reactions in Solid Carbon Dioxide: Lithography and Methane Formation under High-Energy Irradiation

Key Points

• This research aims to explore the effects of high-energy electron irradiation on solid carbon dioxide and its applications in lithography and methane formation.
• Investigated electron-induced reactions in solid carbon dioxide under high-energy irradiation.
• Analyzed decomposition mechanisms and product formation during the experimental processes.
• Observed significant lithography effects in carbon dioxide when exposed to electron bombardment.
• Demonstrated formation of methane as a byproduct during the decomposition process.