Key points are not available for this paper at this time.
The successful fabrication of 3D periodic structures composed of two transparent materials in the submicrometre range is reported for the first time. The material system comprises a-Si (n = 3.26) and SiO2 (n = 1.46), and sputter-etching leads to ‘high-fidelity’ layer-to-layer propagation of a concave-convex pattern.
Shojiro Kawakami (Thu,) studied this question.