The successful fabrication of 3D periodic structures composed of two transparent materials in the submicrometre range is reported for the first time. The material system comprises a-Si (n = 3.26) and SiO2 (n = 1.46), and sputter-etching leads to ‘high-fidelity’ layer-to-layer propagation of a concave-convex pattern.
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Shojiro Kawakami (1997) studied this question.
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