Integration of Raman spectroscopy and SEM offers insights into chemical species and molecular vibrations in materials.
In this article we present an integration of a Raman spectroscopy system with a scanning electron microscope (SEM) and present several applications demonstrating the advantages of correlative microscopy using these technologies. Combining Raman and SEM allows direct collection of data describing the molecular and lattice vibrations in materials and the spatial distribution of different chemical species from the same sample area at high resolution. Examples include analysis of carbon types in a carbon-based battery electrode, SEM EDS analysis of a geological sample, and identification of contaminants on a fuel injector. The information provided by Raman spectroscopy complements the ultrastructural details from SEM imaging, and together the data provide comprehensive insights into the chemistry and structure of the samples.
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Jorge Diniz (2025) studied this question.
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